VUV

To miniaturize integrated semiconductor circuits, a shorter wavelength light is needed. In the latest exposure system (stepper), the excimer laser (ArF) with a wave length of 193nm is used. Our CaF2 is excellent in terms of high transmission and durability, and is suitable for ArF excimer lasers.

VUV Transmittance Spectrum

Laser Durability (ArF Laser, 30mJ/cm2)

Standard Ratings

  • Diameter Maximum: 250mm
  • Thickness: 100mm
  • Homogeneity: 1ppm or less
  • Birefringence: 1nm/cm or less
CaF2_laser_s
Calcium fluoride under laser irradiation

(Irradiation is made under the conditions for the purpose of the filming.)